Please use this identifier to cite or link to this item: https://ir.sc.mahidol.ac.th/handle/123456789/671
Title: High resolution X-ray diffraction analysis of p-type strained InGaAs/AlGaAs multiple quantum well structures
Authors: Tanakorn Osotchan
Keywords: Diffusion in solids;InGaAs/AlGaAs;solid-source;p-type;X-ray;multiple quantum well (MQW)
Issue Date: 2000
Publisher: The 1999 MRS Fall Meeting - Symposium OO 'Infrared Applications of Semiconductors III
Citation: ฟิสิกส์
Series/Report no.: ;229-234
Abstract: Be-doped InGaAs/AlGaAs multiple quantum well (MQW) structures, grown by solid-source molecular beam epitaxy with different doping concentration in the wells, were investigated by x-ray diffraction and transmission electron microscopy (TEM). Some features have been observed. (1) The MQW mean mismatch increases from 1.176×10-3 to 1.195×10-3 and 1.29×10-3 for the structures with doping concentration of 1×1017 cm-3, 1×1018 cm-3 and 2×1019 cm-3 in the wells, respectively. (2) The period of the MQW also increases with doping density. (3) The intensity of the first order satellite in the rocking curves decreases as the Be concentration is increased, indicating that indium diffusion in the heavily doped wells is likely more significant than that in the lightly doped ones. (4) The full width at half maximum of the zero-order satellite peak becomes widened as doping concentration increases, indicating that high Be-doping in the well likely deteriorates the interfaces of the multiple quantum well stacks. In addition, TEM measurement is conducted and clear pictures on well and barrier layers of the structures are observed. The information obtained is of great value for the design of p-doped quantum well infrared photodetectors.
Description: Scopus
URI: https://ir.sc.mahidol.ac.th/handle/123456789/671
ISSN: 02729172
Appears in Collections:Physics: International Proceedings

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